EL-FLOW® Series Mass Flow Meters/Controllers are thermal mass flow meters of modular construction with a 'laboratory style' pc-board housing. Control valves can either be integrally or separately mounted, to measure and control gas flows.
Metal-to-metal seal construction ensures long-term leak tightness (to atmosphere); Electropolished wetted parts; Flow ranges from 0.1...5 sccm up to 0.6...100 slm N2-equivalent (higher on request); Multi Gas/Multi Range functionality; Optional solutions for low pressure drop or vacuum applications; Pressure ranges from 0.1...5 up to 18...900 psi
Optional surface mount constructions (c-seal / w-seal); Compliant with RoHS directives; Modbus-RTU, DeviceNetTM, Profibus-DP®, or FLOW-BUS slave; RS232 interface; Accuracy, ± 0.8% RD + ± 0.2% FS; Storage of max. 8 calibration curves; Alarm and counter functions; Single rail power supply: +15 or +24 Vdc